Gas sensor and manufacturing method therefor

ABSTRACT

A sensor element has a cross-sectional area that increases either uniformly or gradually from a positive (+) electrode side toward a negative (−) electrode side, thereby leading a hot spot, which attempts to move to the negative electrode side, to a lower resistance side. A position that is at nearly equal distances from paired electrodes formed on either end of the sensor element is set as a hot spot generating position, so as to avoid damage to the electrodes due to heat emitted by the hot spot.

TECHNICAL FIELD

The present invention relates to a gas sensor, which detects gas concentration such as oxygen concentration within a measuring atmosphere, and a manufacturing method therefor.

BACKGROUND ART

An oxygen sensor having an oxygen concentration detecting element made of various materials is well-known. For example, the oxygen sensor using composite ceramics made by mixing LnBa₂Cu₃O₇₋₆ and Ln₂BaCuO₅ (where Ln denotes rare earth element) is known as the material composition of the oxygen sensor using a ceramic sintered body (see Patent Document 1).

The oxygen sensor using a ceramic sintered body detects oxygen concentration utilizing a hot-spot phenomenon that a part of the linear member (sensor element) is red-heated when a voltage is applied. Such a hot spot-type oxygen sensor is characterized in that O²⁻ ions taken into the crystal structure of an oxygen sensor element travel to the positive electrode. On the other hand, a hot spot generating at this time moves to the negative electrode in which the number of O²⁻ ions have decreased.

Because of these characteristics, control of hot spot generating positions in the oxygen sensor element is impossible. However, according to Patent Document 2, a narrow part formed in the sensor element made of a linear body etc. is used as a hot spot, and thus the hot spot is generated at a specific position of the sensor element. According to Patent Document 3, the central part of the element is formed to be a narrow part, which thus has a smaller cross-sectional area and a larger resistance than the other portions, resulting in generation of a hot spot in the narrow part.

PRIOR ART DOCUMENTS Patent Documents

Patent Document 1: JP 2007-85816A (U.S. Pat. No. 4,714,867)

Patent Document 2: JP 10-73549A

Patent Document 3: JP 2000-19143A

DISCLOSURE OF THE INVENTION Problem to be Solved by the Invention

The conventional hot-spot type oxygen sensor described above either has a long and slender rectangular parallelepiped shape with a uniform cross-sectional area, or has the same shape with a narrow part in the central part of the element. Such a sensor material has a problem that generation of a hot spot, which emits intense heat, at a position close to the negative electrode causes remarkable deterioration of the electrode material.

Moreover, according to Patent Documents 2 and 3, either generation of a hot spot at a specific position in the sensor element, or provision of a narrow part in the sensor element so as to ensure generation of the hot spot causes formation of a fragile part in the sensor element, which is a linear member, resulting in degradation of the sensor element in strength. Provision of the narrow part not only makes the manufacturing steps of the sensor element complicated but also causes the oxygen sensor using the sensor element to deteriorate and durability to decrease.

The present invention is devised in light of the problems described above, and aims to provide a gas sensor that allows fixation of a hot spot generating position without generation of fragile parts.

Means of Solving the Problem

The present invention aims to resolve the above problems, and includes the following structure, for example, as means for achieving the above aim. That is, the present invention is a gas sensor characterized in that it is made from a ceramic sintered body for detecting as gas concentration, either change in an electric current value or change in a resistance value measured when a voltage is applied to a sensor element. The sensor element has a cross-sectional area that changes shape from one electrode side toward the other electrode side of paired electrode parts formed on either longitudinal end.

For example, it is characterized in that the cross-sectional area increases or decreases either uniformly or gradually from the one electrode side toward the other electrode side. It is characterized in that, for example, the sensor element has a constant thickness, and a width that increases or decreases either uniformly or gradually from the one electrode side toward the other electrode side. It is also characterized in that, for example, the sensor element has thickness and width increasing or decreasing either uniformly or gradually from the one electrode side toward the other electrode side. It is further characterized in that, for example, of the paired electrode parts, an electrode part formed on a side where cross-sectional area of the sensor element is larger is set as a negative electrode, and an electrode part formed on a side where the cross-sectional area is smaller is set as a positive electrode. Yet even further, for example, it is characterized in that either the negative electrode and the positive electrode have nearly the same size, or size of the negative electrode is larger than that of the positive electrode. It is also characterized in that, for example, either both the negative electrode and the positive electrode are formed on the same side of the sensor element, or one of the negative electrode or the positive electrode is formed on an upper surface of the sensor element and the other is formed on an under surface of the sensor element.

A manufacturing method for a gas sensor made from a ceramic sintered body for detecting as gas concentration, either change in an electric current value or change in a resistance value measured when a voltage is applied to a sensor element is characterized by including the steps of: manufacturing a green sheet from slurry formed by mixing together raw materials of the sensor element; manufacturing a ring-shaped first green sheet by punching out the green sheet so as to form a punched hole having a predetermined diameter; manufacturing a ring-shaped second green sheet by forming belt-like shaped electrodes along periphery of the punched hole of the first green sheet and a ring-shaped outer periphery of the first green sheet; manufacturing a ring-shaped laminated body by coaxially stacking a plurality of the first green sheet with the second green sheet as a top surface; cutting the laminated body along a plurality of diametral virtual lines of the ring-shaped laminated body that is formed by rotating around the axis of the ring-shaped laminated body every fixed angle in the circumferential direction; and baking a sensor element divided into individual pieces through said cutting, and forming paired electrodes on either end part in the longitudinal direction.

For example, it is characterized in that in the step of cutting the ring-shaped laminated body, cutting of the laminated body is carried out either by rotating the laminated body around its axis every fixed angle in the circumferential direction, and moving a cutter part arranged on an upper part of the laminated body a predetermined distance vertically downward in sync with said rotating, or by fixing the laminated body and moving a cutter part arranged on an upper part of the laminated body a predetermined distance vertically downward while rotating around the axis of the laminated body every fixed angle in the circumferential direction.

Furthermore, a manufacturing method for a gas sensor made from a ceramic sintered body for detecting as gas concentration, either change in an electric current value or change in a resistance value measured when a voltage is applied to a sensor element is characterized by including the steps of: manufacturing a long green sheet from slurry formed by mixing together raw materials of the sensor element; manufacturing a sensor element piece with a nearly trapezoidal shape, in a planar view, by cutting the green sheet in a zigzag shape at predetermined intervals in a direction crossing a longitudinal direction of the green sheet; and baking the sensor element piece and forming paired electrodes on either end part in the longitudinal direction.

Results of the Invention

According to the present invention, fixation of the hot spot generating position in a gas sensor prevents deterioration etc. of the electrode due to the hot spot.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is an external perspective diagram of an oxygen sensor according to an embodiment of the present invention;

FIG. 2 is a flow chart showing oxygen sensor manufacturing steps in time series according to the embodiment;

FIG. 3 shows processing etc. of components corresponding to each manufacturing step of FIG. 2;

FIG. 4 shows processing etc. of components corresponding to each manufacturing step of FIG. 2;

FIG. 5 shows examples of manufacturing sensor elements according to Modified Example 1;

FIG. 6 shows external perspective diagrams of sensor elements according to Modified Example 2;

FIG. 7 shows planar views of sensor elements according to Modified Example 3;

FIG. 8 shows example patterns of punching out sensor elements according to Modified Example 3 from a green sheet; and

FIG. 9 shows external perspective diagrams of sensor elements according to Modified Example 4.

DESCRIPTION OF EMBODIMENTS

An embodiment according to the present invention is described below in detail with reference to accompanying drawings. Here, an oxygen sensor is described as an example of a gas sensor. FIG. 1 is an external perspective diagram of the oxygen sensor according to the embodiment of the present invention. Note that the oxygen sensor has a structure in which a sensor element is stored inside a tubular body such as a cylindrical glass, made of heat-resistant glass. However, illustration of the tubular body is omitted from the drawing.

The oxygen sensor 10 according to the embodiment shown in FIG. 1 includes a sensor element 12, paired electrodes 13 and 15 formed facing each other at longitudinal ends of the sensor element 12, and lead wires 17 and 19 connected to the respective electrodes 13 and 15.

The sensor element 12 has a shape that the cross-sectional area of the element on one electrode side differs from that of the element on the other electrode side. Specifically, the shape of the cross-sectional area of the sensor element 12 increases uniformly from the positive (+) electrode 13 toward the negative (−) electrode 15.

A ratio of cross-sectional area S1 on the negative electrode side when the sensor element 12 is cut along a line indicated by arrows A-A′ of FIG. 1 to cross-sectional area S2 on the positive electrode side when the sensor element 12 is cut along a line indicated by arrows B-B′ is set to 1.5:1 to 2:1, for example.

The sensor element 12 is constituted by a ceramic sintered body made by mixing LnBa₂Cu₃O₇₋₆ and Ln₂BaCuO₅, for example. In this chemical composition, Ln denotes rare earth element (for example, Sc (scandium), Y (yttrium), La (lanthanum), Nd (neodymium), Sm (samarium), Eu (europium), Gd (gadolinium), Dy (dysprosium), Ho (holmium), Er (erbium), Tm (thulium), Yb (ytterbium), Lu (lutetium), etc.) Moreover, δ represents oxygen defect (0 to 1).

Results from comparison of the oxygen sensor according to the embodiment to the conventional oxygen sensor, which is made from a sensor element having a slender, rectangular parallelepiped shape and uniform cross-sectional areas from the positive electrode side to the negative electrode side, are described below. This comparison has been carried out under the following conditions: An oxygen sensor is housed in a cylindrical glass tube made of a heat-resistant glass where conductive caps (mouthpieces) made of metal such as copper (Cu) are fitted to respective ends of the glass tube, the electric conductive caps are connected to a power source, resulting in an electric current passing through the sensor element, and generation of a hot spot is observed.

This observation has shown that with the conventional oxygen sensor, a hot spot has generated in the vicinity of the negative electrode of the sensor element, while with the oxygen sensor according to the embodiment, a hot spot has generated in the central part of the sensor element.

The hot spot generating position in the oxygen sensor according to the embodiment can be considered a position that is at nearly equal distances from the paired electrodes formed on either end of the sensor element. This allows avoiding damage to the electrode due to heat emitted by the hot spot. Moreover, in order to control hot spot generating positions, provision of a narrow part in the sensor element as in the conventional case is not required, thus avoiding formation of a fragile part in the sensor element.

A manufacturing method for the oxygen sensor according to the embodiment is described next. FIG. 2 is a flow chart showing oxygen sensor manufacturing steps in time series according to the embodiment. Here, a manufacturing method for the oxygen sensor illustrated in FIG. 1, which has an element structure where shape of the cross-sectional area of the sensor element increases uniformly from the positive electrode toward the negative electrode, is described. Moreover, FIG. 3 and FIG. 4 show processing etc. of components corresponding to each manufacturing step for the oxygen sensor of FIG. 2.

In step S1 of FIG. 2, raw materials of the oxygen sensor element are mixed together and pulverized. More specifically, LnBa₂Cu₃O₇₋₆ and Ln₂BaCuO₅ (Ln denotes rare earth element) are mixed together as materials for the oxygen sensor element, and the mixed raw materials are pulverized using a ball mill or the like, resulting in the same sized grains.

In step S2, the materials obtained in the step described above are subjected to heat treatment (preliminary baking) at 900 to 1000° C. In step S3, the preliminarily baked raw materials are pulverized using a ball mill or the like, resulting in the same sized grains, and then slurry is manufactured. Here, a binder resin (e.g., butyral resin (PVB)), a dispersant (e.g., sorbitan trioleate), a plasticizer (e.g., bis phthalate (2-ethylhexyl), DOP), and a diluting solvent (e.g., 2-ethylhexanol) are mixed together with the preliminarily baked materials.

In step S4, a film is formed using a doctor blade so as to manufacture a green sheet of approximately 10 to 100 μm, for example. In subsequent step S5, as shown in FIG. 3A, central circles 21 a to 21 d are punched out from a green sheet 20 using a mechanical punch etc.

Step S6 includes forming in the same sheet, a ring-shaped green sheet 27 a positioned on the top layer of a laminated body described later and ring-shaped green sheets 27 b to 27 d stacked on the bottom layer thereof, and printing electrodes. More specifically, as shown in FIGS. 3A and 3B, electrode material made of silver (Ag) paste, for example, is screen printed in a ring shape along the inner periphery of the central circle 21 a corresponding to the central circle of the ring-shaped green sheet 27 a on the top surface of the laminated body, thus forming a positive electrode 25.

Simultaneous to forming the positive electrode, the electrode material is screen printed in a ring shape along an outer periphery 22 a, which is at a distance equal to the radius of the ring-shaped green sheet 27 a (namely, longitudinal length of the sensor element) from the center of the central circle 21 a, thus forming a negative electrode 23. The other central circles 21 b to 21 d are left punched out without forming any electrodes.

In step S7, the green sheet 20 is punched out using a mechanical punch etc. along outer peripheries 22 a to 22 d (in the case of the central circle 21 a, the outer periphery 22 a becomes outer periphery of the negative electrode 23) stipulated at a distance equal to the radius of the ring-shaped green sheet (sensor element length) from the center of each of the central circles 21 a to 21 d. FIG. 3C illustrates the green sheets (ring-shaped green sheets) 27 a to 27 d each punched out in a ring shape from the green sheet 20.

In step S8, the ring-shaped green sheet 27 a in which the electrodes 23 and 25 are formed in the inner and outer peripheries respectively is placed on the top part of the ring-shaped green sheets 27 b to 27 d in which electrodes are not provided, and a rod-like pin 31 is then inserted through center holes of the ring-shaped green sheets, thereby stacking them while aligning them, as illustrated in FIG. 3D. The laminated material of the ring-shaped sheets is then applied pressure using a uniaxial press, for example, thereby manufacturing a laminated body 33 having a predetermined thickness illustrated in FIG. 3E.

Here, the ring-shaped green sheet 27 a is stacked on the three ring-shaped green sheets 27 b to 27 d, which become under layers thereof, thereby manufacturing a laminated body. However, the number of stacked layers is not limited thereto, and a necessary number of ring-shaped green sheets are stacked in accordance with thickness of the laminated body to be manufactured.

Moreover, while the method of forming each ring-shaped green sheet layer in the same sheet has been described, a method of forming together a plurality of the ring-shaped green sheet 27 a to be the top surface of the same sheet may be used.

In step S9, the laminated body 33 is cut (diced) in accordance with product (sensor element) size. Here, as illustrated in FIG. 4A, the laminated body 33 is adhered and fixed on to a guillotine stage 35, and while rotating the guillotine stage 35 around the circle center of the laminated body 33 every fixed angle (e.g., 10° at a time), a cutter 37 is moved a predetermined distance vertically downward, thereby cutting the laminated body 33.

In step S10, the sensor element 32 cut in the dicing step described above and divided into individual pieces as illustrated in FIG. 4B is baked in atmospheric air at, for example, 920° C. for 10 hours. Note that de-binding may be carried out on the laminated body before baking, and annealing may be performed on the laminated body after baking.

In step S11, lead wires 47 and 49 are attached using a conductive paste, for example, to the positive electrode 43 and the negative electrode 45 of the sensor element 42 after baking, respectively, as illustrated in FIG. 4C. The method of attaching the lead wires is not limited to the above description. For example, instantly heating a joint using a pulse heat power source so as to solder or weld, or wire bonding through ultrasonic vibration or thermocompression bonding may be used.

The length of the sensor element divided into individual pieces and baked as described above is 5 mm, for example, and the outer dimensions (size) of the oxygen sensor include, for example, a glass tube diameter of 5 mm, glass tube length of 20 mm, and air hole diameter of 2.5 mm. As a result, provision of the sensor element with the dimensions described above makes the oxygen sensor exchangeable via the air holes of the glass tube, for example.

Note that while with the oxygen sensor 10 illustrated in FIG. 1, the paired electrodes 13 and 15 are formed on either end of the same surface (upper surface) in the longitudinal direction of the sensor element 12, paired electrodes may be formed on an upper surface of one end of the sensor element 12, and on an under surface of the other end of the sensor element 12.

Moreover, while both side surfaces in the axial direction of the oxygen sensor 10 of FIG. 1 extend linearly between the positive electrode and the negative electrode in a planar view, the sensor is not limited thereto. As long as a condition that the cross-sectional area between both electrodes of the sensor element increases uniformly is satisfied, any one of shapes in which: either both side surfaces between the positive electrode and the negative electrode change into a curved form, or one side surface changes into a curved form and the other side surface changes linearly, in a planar view, may be used.

As described above, the hot spot-type sensor element has a high resistance value on the opposite side to the travelling direction of O²⁻ ions, that is, the negative electrode side including a decreased number of O²⁻ ions. Therefore, the oxygen sensor according to the embodiment has the cross-sectional area with a shape that increases uniformly from the positive (+) electrode side toward the negative (−) electrode side, and the hot spot attempting to move to the negative electrode side may thus be led to a lower resistance side.

As a result, a position that is at nearly equal distances from paired electrodes formed on either end of the sensor element may be a hot spot generating position, and prevention of damage to electrodes from heat emitted from a hot spot as the hot spot approaches the electrode and prevention of generation of cracks in a sensor element etc. caused by thermal stress due to thermal expansion are possible.

Furthermore, due to making the cross-sectional area of the sensor element increase uniformly from the positive electrode toward the negative electrode, the negative electrode may be made larger in size than the positive electrode. As a result, even in the case where concentration of O²⁻ ions in the sensor element has changed, causing a hot spot to move to the negative electrode side, more effective heat radiation is facilitated on the negative side of the sensor element. Due to such heat radiation effect, the hot spot generating position may be kept away from the negative electrode side so as to be at a position nearly equal from both electrodes.

The oxygen sensor according to the present invention is not limited to the embodiment described above, and various modifications are possible. Modified examples are described below.

Modified Example 1

While a sensor element is obtained by dicing (cutting) a ring-shaped green sheet and dividing into individual pieces according to the embodiment described above, the shape of the green sheet before cutting is not limited to a ring shape. As Modified Example 1, FIGS. 5A and 5B show examples of manufacturing sensor elements by dicing a green sheet having a belt-like shape.

That is, in the examples illustrated in FIGS. 5A and 5B, a long green sheet 50 having width W in accordance with a longitudinal dimension (length in the longitudinal direction) of a sensor element is prepared, and the long green sheet 50 is cut along cutting lines in its width direction.

In FIG. 5A, the long green sheet 50 is diced along cutting lines 51 a running in the width direction of the long green sheet 50 and cutting lines 51 b running diagonally in the width direction. This allows manufacture of sensor elements 52 a to 52 f having shape of: the cross-sectional area thereof increasing uniformly from the one end toward the other end, and width W1 on the one end side smaller than width W2 on the other end side.

Meanwhile, FIG. 5B illustrates an example of dicing the long green sheet 50 along two cutting lines 53 a and 53 b running diagonally in the width direction of the long green sheet 50. This allows manufacture of sensor elements 54 a to 54 f having shape of: the cross-sectional area thereof increasing uniformly from the one end toward the other end, and width W3 on the one end side smaller than width W4 on the other end side.

Modified Example 2

As long as a condition that the cross-sectional area of the sensor elements increases uniformly from the one end toward the other end is satisfied, the overall shape is not limited to a planar shape, as with the sensor element illustrated in FIG. 1 etc. As Modified Example 2, a sensor element 62 illustrated in FIG. 6A has an overall pyramid shape in which one end bottom surface has a smaller area than the other end bottom surface. In this example, lead lines 63 and 65 are attached to respective electrodes (omitted from the drawing) arranged on the one end bottom surface and the other end bottom surface.

A sensor element 64 illustrated in FIG. 6B has an overall cone shape in which the one end bottom surface has a smaller area than the other end bottom surface. In this example as well, lead lines 67 and 69 are attached to respective electrodes, which are omitted from the drawing, arranged on the one end bottom surface and the other end bottom surface.

Modified Example 3

Examples where the cross-sectional area of the sensor element increases in a stepwise fashion are described as Modified Example 3. FIG. 7A is an example where shape of a sensor element 72 is a T shape in a planar view. With the sensor element 72, cross-sectional area increases gradually or stepwisely from one side on which a lead wire 73 is attached, toward another side on which a lead wire 75 is attached.

FIG. 7B is an example where shape of a sensor element 74 is an L shape in a planar view. In this example as well, cross-sectional area increases gradually or stepwisely from one side on which a lead wire 77 is attached, toward another side on which a lead wire 79 is attached.

Note that FIG. 8A illustrates an example punch-out pattern in the case of punching out a plurality of the T-shaped sensor element 72 of FIG. 7A from a single green sheet 70. Moreover, FIG. 8B shows an example punch-out pattern in the case of punching out a plurality of the L-shaped sensor element 74 of FIG. 7B from a single green sheet 80. In either example, the number of sensor elements formed in a single green sheet may be maximized.

Modified Example 4

While examples of gradually increasing the cross-sectional area of planar sensor elements are described in Modified Example 3, sensor elements each having a three-dimensional shape where cross-sectional area increases gradually or stepwisely are described as Modified Example 4. For example, a sensor element 82 of FIG. 9A has a shape in which two rectangular parallelepipeds having differing cross-sectional areas are connected. Moreover, lead wires 83 and 85 are attached to either end surface of the sensor element 82.

On the other hand, a sensor element 84 of FIG. 9B has a shape in which two cylinders having differing cross-sectional areas are connected. Lead wires 87 and 89 are attached to either end surface of the sensor element 84. Accordingly, the cross-sectional area of the sensor element increases gradually or stepwisely from one end to the other end, even with the sensor element 82 of FIG. 9A and the sensor element 84 of FIG. 9B.

EXPLANATION OF REFERENCES

-   -   10: Oxygen sensor     -   12, 42, 52 a-52 f, 54 a-54 f, 62, 64, 72, 74, 82, 84: Sensor         element     -   13, 15, 43, 45: Electrode     -   17, 19, 47, 49, 63, 65, 67, 69, 73, 75, 87, 89: Lead wire     -   21 a-21 d: Central circle     -   22 a-22 d: Periphery     -   23: Negative electrode     -   25: Positive electrode     -   27 a-27 d: Ring-shaped green sheet     -   31: Rod-like pin     -   33: Laminated body     -   50: Long green sheet     -   70, 80: Green sheet 

1. A gas sensor made from a ceramic sintered body for detecting as gas concentration, either change in an electric current value or change in a resistance value measured when a voltage is applied to a sensor element, wherein the sensor element has a shape in which a cross-sectional area changes from one electrode side toward the other electrode side of paired electrode parts formed on either longitudinal end.
 2. The gas sensor according to claim 1, wherein the cross-sectional area increases or decreases either uniformly or gradually from the one electrode side toward the other electrode side.
 3. The gas sensor according to claim 2, wherein the sensor element has a constant thickness, and a width that increases or decreases either uniformly or gradually from the one electrode side toward the other electrode side.
 4. The gas sensor according to claim 2, wherein the sensor element has thickness and width increasing or decreasing either uniformly or gradually from the one electrode side toward the other electrode side.
 5. The gas sensor according to claim 1, wherein of the paired electrode parts, an electrode part formed on one side where cross-sectional area of the sensor element is larger is set as a negative electrode, and an electrode part formed on another side where the cross-sectional area is smaller is set as a positive electrode.
 6. The gas sensor according to claim 5, wherein either the negative electrode and the positive electrode have nearly the same size, or size of the negative electrode is larger than that of the positive electrode.
 7. The gas sensor according to claim 5, wherein either both the negative electrode and the positive electrode are formed on the same side of the sensor element, or one of the negative electrode or the positive electrode is formed on an upper surface of the sensor element and the other is formed on an under surface of the sensor element.
 8. A manufacturing method for a gas sensor made from a ceramic sintered body for detecting as gas concentration, either change in an electric current value or change in a resistance value measured when a voltage is applied to a sensor element; comprising the steps of: manufacturing a green sheet from slurry formed by mixing together raw materials of the sensor element; manufacturing a ring-shaped first green sheet by punching out the green sheet so as to form a punched hole having a predetermined diameter; manufacturing a ring-shaped second green sheet by forming belt-like shaped electrodes along periphery of the punched hole of the first green sheet and a ring-shaped outer periphery of the first green sheet; manufacturing a ring-shaped laminated body by coaxially stacking a plurality of the first green sheet with the second green sheet as a top surface; cutting the laminated body along a plurality of diametral virtual lines of the ring-shaped laminated body that is formed by rotating around the axis of the ring-shaped laminated body every fixed angle in the circumferential direction; and baking a sensor element divided into individual pieces through said cutting, and forming paired electrodes on either end part in the longitudinal direction.
 9. The manufacturing method for a gas sensor according to claim 8, wherein in the step of cutting the ring-shaped laminated body, cutting of the laminated body is carried out either by rotating the laminated body around its axis every fixed angle in the circumferential direction, and moving a cutter part arranged on an upper part of the laminated body a predetermined distance vertically downward in sync with said rotating, or by fixing the laminated body and moving a cutter part arranged on an upper part of the laminated body a predetermined distance vertically downward while rotating around the axis of the laminated body every fixed angle in the circumferential direction.
 10. A manufacturing method for a gas sensor made from a ceramic sintered body for detecting as gas concentration, either change in an electric current value or change in a resistance value measured when a voltage is applied to a sensor element, comprising the steps of: manufacturing a long green sheet from slurry formed by mixing together raw materials of the sensor element; manufacturing a sensor element piece with a nearly trapezoidal shape, in a planar view, by cutting the green sheet in a zigzag shape at predetermined intervals in a direction crossing a longitudinal direction of the green sheet; and baking the sensor element piece and forming paired electrodes on either end part in the longitudinal direction.
 11. The gas sensor according to claim 6, wherein either both the negative electrode and the positive electrode are formed on the same side of the sensor element, or one of the negative electrode or the positive electrode is formed on an upper surface of the sensor element and the other is formed on an under surface of the sensor element. 